Abstract
A simple model for the leakage current decay in Al/HfYOx/GaAs structures subjected to constant voltage stress is presented. The model is based on a circuit representation of the so-called Curie-von Schweidler (CS) law for dielectric degradation that can be easily extended to other metal-insulator- semiconductor (MIS) structures exhibiting similar behavior. By means of the inclusion of effective series and parallel resistances the proposed approach allows to eliminate the singularities of the CS law at t = 0 and t = ∞ so that the final result corresponds to a power-law logistic current-time characteristic.
| Original language | English |
|---|---|
| Pages (from-to) | 1295-1297 |
| Number of pages | 3 |
| Journal | Microelectronic Engineering |
| Volume | 88 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jul 2011 |
Keywords
- Curie-von Schweidler law
- MIS
- Oxide degradation