Nanoelectromechanical systems as single electron switches and field emitters

Hyun S. Kim, Hua Qin, Robert H. Blick

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We measured field emission from a silicon nanopillar mechanically oscillating between two electrodes. The pillar has a height of about 200 nm and a diameter of 50 nm, allowing resonant mechanical excitations at radio frequencies. The tunneling barriers for field emission are mechanically modulated via displacement of the gold island on top of the pillar. We present a rich frequency-dependent response of the emission current in the frequency range of 300-400 MHz at room temperature. Modified Fowler-Nordheim field emission is observed and attributed to the mechanical oscillations of the nanopillar.

Original languageEnglish
Title of host publicationMEMS/MOEMS Components and Their Applications IV
DOIs
StatePublished - 2007
EventMEMS/MOEMS Components and Their Applications IV - San Jose, CA, United States
Duration: 22 Jan 200723 Jan 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6464
ISSN (Print)0277-786X

Conference

ConferenceMEMS/MOEMS Components and Their Applications IV
Country/TerritoryUnited States
CitySan Jose, CA
Period22/01/0723/01/07

Fingerprint

Dive into the research topics of 'Nanoelectromechanical systems as single electron switches and field emitters'. Together they form a unique fingerprint.

Cite this