New micromachined microstrip transmission lines for application in millimeter-wave circuits

Han Shin Lee; Sung Chan Kim; Byoung Ok Lim; Kyoung Man Kim; Won Young Uhm; Young Hoon Chun; Dong Hoon Shin; Soon Koo Kim; Hyun Chang Park; Jin Koo Rhee

doi:10.1002/mop.11270

New micromachined microstrip transmission lines for application in millimeter-wave circuits

Han Shin Lee, Sung Chan Kim, Byoung Ok Lim, Kyoung Man Kim, Won Young Uhm, Young Hoon Chun, Dong Hoon Shin, Soon Koo Kim, Hyun Chang Park, Jin Koo Rhee

Department of Electronics & Electrical Engineering

Dongguk University

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wave frequency bands with wide impedance ranges. The measured DAML with a 10-μm post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Ω, which agrees well with the simulated results.

Original language	English
Pages (from-to)	6-9
Number of pages	4
Journal	Microwave and Optical Technology Letters
Volume	40
Issue number	1
DOIs	https://doi.org/10.1002/mop.11270
State	Published - 5 Jan 2004

Keywords

Airbridge
DAML
Microstrip line
RF MEMS
Surface micromachining

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10.1002/mop.11270

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title = "New micromachined microstrip transmission lines for application in millimeter-wave circuits",

abstract = "In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wave frequency bands with wide impedance ranges. The measured DAML with a 10-μm post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Ω, which agrees well with the simulated results.",

keywords = "Airbridge, DAML, Microstrip line, RF MEMS, Surface micromachining",

author = "Lee, {Han Shin} and Kim, {Sung Chan} and Lim, {Byoung Ok} and Kim, {Kyoung Man} and Uhm, {Won Young} and Chun, {Young Hoon} and Shin, {Dong Hoon} and Kim, {Soon Koo} and Park, {Hyun Chang} and Rhee, {Jin Koo}",

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AU - Lee, Han Shin

AU - Kim, Sung Chan

AU - Lim, Byoung Ok

AU - Kim, Kyoung Man

AU - Uhm, Won Young

AU - Chun, Young Hoon

AU - Shin, Dong Hoon

AU - Kim, Soon Koo

AU - Park, Hyun Chang

AU - Rhee, Jin Koo

PY - 2004/1/5

Y1 - 2004/1/5

N2 - In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wave frequency bands with wide impedance ranges. The measured DAML with a 10-μm post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Ω, which agrees well with the simulated results.

AB - In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wave frequency bands with wide impedance ranges. The measured DAML with a 10-μm post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Ω, which agrees well with the simulated results.

KW - Airbridge

KW - DAML

KW - Microstrip line

KW - RF MEMS

KW - Surface micromachining

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EP - 9

JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

IS - 1

ER -

New micromachined microstrip transmission lines for application in millimeter-wave circuits

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Keywords

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