Abstract
In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wave frequency bands with wide impedance ranges. The measured DAML with a 10-μm post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Ω, which agrees well with the simulated results.
| Original language | English |
|---|---|
| Pages (from-to) | 6-9 |
| Number of pages | 4 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 40 |
| Issue number | 1 |
| DOIs | |
| State | Published - 5 Jan 2004 |
Keywords
- Airbridge
- DAML
- Microstrip line
- RF MEMS
- Surface micromachining