Abstract
In this paper, we report on the role of slit-inductors in notably improving phase shifting capabilities in Ba0.6Sr0.4TiO3 (BST) tunable phase shifters utilizing interdigital capacitor (IDC) structure. The IDC-based coplanar waveguide (CPW) phase shifter with slit-inductors fabricated on (100) oriented BST films deposited on MgO substrates exhibits a much enhanced phase difference of 35.52°, as compared to that (25.23°) of the IDC-based phase shifter at 12 GHz. The figure of merit (FoM) of the IDC-based phase shifters with slit-inductors shows larger value of 43.60°/dB as a result of improving phase shifting while retaining an appropriate insertion loss compared to that (35.67°/dB) of the IDC-based phase shifter without slit-inductor. This work demonstrates potential use of slit-inductors for producing high-performance CPW based BST tunable elements in microwave circuit.
Original language | English |
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Pages (from-to) | 5245-5248 |
Number of pages | 4 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 46 |
Issue number | 8 A |
DOIs | |
State | Published - 6 Aug 2007 |
Keywords
- BaSrTiO (BST)
- Interdigital capacitor (IDC)
- Phase shifter
- Slit-inductor