O2 plasma enhanced high performance polymer TFTs array on plastic substrates

S. K. Park; Y. H. Kim; J. I. Han; D. G. Moon; W. K. Kim; M. G. Kwak

O₂ plasma enhanced high performance polymer TFTs array on plastic substrates

S. K. Park, Y. H. Kim, J. I. Han, D. G. Moon, W. K. Kim, M. G. Kwak

Department of Chemical and Biochemical Engineering

Korea Electronics Technology Institute

Research output: Contribution to journal › Conference article › peer-review

Abstract

Poly (3-hexylthiophene)-based TFTs array was fabricated on plastic substrates and O₂ plasma treatment effect was investigated. As a gate dielectric, a dual layer structure of polyimide and ion-beam deposited silicon dioxide layer was used. P3HT layer was printed with contact printing and spin coating method and the device characteristics have been analyzed. Based on the experiments, we fabricated TFT device with 0.02 ∼ 0.025 cm²/V·s in saturation carrier mobility and on/off current ratio about 10³ ∼ 10⁴.

Original language	English
Pages (from-to)	391-394
Number of pages	4
Journal	SID Conference Record of the International Display Research Conference
State	Published - 2002
Event	22nd International Display Research Conference - Nice, France Duration: 2 Oct 2002 → 4 Oct 2002

Cite this

@article{6d73ba12d3b84238b5cbc787e5e4f2b8,

title = "O2 plasma enhanced high performance polymer TFTs array on plastic substrates",

abstract = "Poly (3-hexylthiophene)-based TFTs array was fabricated on plastic substrates and O2 plasma treatment effect was investigated. As a gate dielectric, a dual layer structure of polyimide and ion-beam deposited silicon dioxide layer was used. P3HT layer was printed with contact printing and spin coating method and the device characteristics have been analyzed. Based on the experiments, we fabricated TFT device with 0.02 ∼ 0.025 cm2/V·s in saturation carrier mobility and on/off current ratio about 103 ∼ 104.",

author = "Park, {S. K.} and Kim, {Y. H.} and Han, {J. I.} and Moon, {D. G.} and Kim, {W. K.} and Kwak, {M. G.}",

year = "2002",

language = "English",

pages = "391--394",

journal = "SID Conference Record of the International Display Research Conference",

issn = "1083-1312",

publisher = "Society for Information Display",

note = "22nd International Display Research Conference ; Conference date: 02-10-2002 Through 04-10-2002",

}

TY - JOUR

T1 - O2 plasma enhanced high performance polymer TFTs array on plastic substrates

AU - Park, S. K.

AU - Kim, Y. H.

AU - Han, J. I.

AU - Moon, D. G.

AU - Kim, W. K.

AU - Kwak, M. G.

PY - 2002

Y1 - 2002

N2 - Poly (3-hexylthiophene)-based TFTs array was fabricated on plastic substrates and O2 plasma treatment effect was investigated. As a gate dielectric, a dual layer structure of polyimide and ion-beam deposited silicon dioxide layer was used. P3HT layer was printed with contact printing and spin coating method and the device characteristics have been analyzed. Based on the experiments, we fabricated TFT device with 0.02 ∼ 0.025 cm2/V·s in saturation carrier mobility and on/off current ratio about 103 ∼ 104.

AB - Poly (3-hexylthiophene)-based TFTs array was fabricated on plastic substrates and O2 plasma treatment effect was investigated. As a gate dielectric, a dual layer structure of polyimide and ion-beam deposited silicon dioxide layer was used. P3HT layer was printed with contact printing and spin coating method and the device characteristics have been analyzed. Based on the experiments, we fabricated TFT device with 0.02 ∼ 0.025 cm2/V·s in saturation carrier mobility and on/off current ratio about 103 ∼ 104.

UR - http://www.scopus.com/inward/record.url?scp=0036455932&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0036455932

SN - 1083-1312

SP - 391

EP - 394

JO - SID Conference Record of the International Display Research Conference

JF - SID Conference Record of the International Display Research Conference

T2 - 22nd International Display Research Conference

Y2 - 2 October 2002 through 4 October 2002

ER -

O₂ plasma enhanced high performance polymer TFTs array on plastic substrates

Abstract

Other files and links

Fingerprint

Cite this