Oxide thin-film transistor for flexible display applications

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Flexible thin-film transistors (TFTs) incorporating In-Ga-Zn-O (IGZO) as the active layer were fabricated on polyemide (PI) substrates, which were detached from the carrier glass after TFT fabrication. The application of appropriate buffer layer and mechanical strain affected the TFT performance and stability. The adoption of the SiNx/AlOx buffer layer as water and hydrogen diffusion barriers significantly improved the devices performance and stability compared to single SiNx or SiOx buffer layers. The TFT performance and reliability under negative bias illumination stress (NBIS) degrade considerably in once the PI film is detached from glass substrate. It is suggested that mechanical strain induces the formation of excess oxygen vacancies in the IGZO film, and these become ionized upon illumination to act as net positive charge traps.

Original languageEnglish
Title of host publication7th IEEE International Nanoelectronics Conference 2016, INEC 2016
PublisherIEEE Computer Society
ISBN (Electronic)9781467389693
DOIs
StatePublished - 12 Oct 2016
Event7th IEEE International Nanoelectronics Conference, INEC 2016 - Chengdu, China
Duration: 9 May 201611 May 2016

Publication series

NameProceedings - International NanoElectronics Conference, INEC
Volume2016-October
ISSN (Print)2159-3523

Conference

Conference7th IEEE International Nanoelectronics Conference, INEC 2016
Country/TerritoryChina
CityChengdu
Period9/05/1611/05/16

Keywords

  • buffer layer
  • flexible thin film transistors
  • IGZO
  • mechanical strain
  • negative bias ilumination stress (NBIS)

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