Phase selective synthesis of gadolinium suicide films on Si(111) using an interfacial SiO2 layer

K. B. Chung, Y. K. Choi, M. H. Jang, M. Noh, C. N. Whang

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

The phase selective synthesis of gadolinium silicide films on a Si(111) substrate using an interfacial SiO2 layer was reported. Systematic investigations on clean and oxidized Si substrates were done by using in situ reflection of high energy electron diffraction, x-ray diffraction, and atomic force microscopy of the silicides formed with post annealing in order to take account of the role of the interfacial silica layer. It was found that the structural transformation of the initial GdSi1.7 hexagonal phase into the GdSi2 orthorhombic phase was enhanced by the silica layer above the decomposition temperature of SiO2(∼800°C).

Original languageEnglish
Pages (from-to)212-215
Number of pages4
JournalJournal of Applied Physics
Volume94
Issue number1
DOIs
StatePublished - 1 Jul 2003

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