Photonic sintering via flash white light combined with deep UV and NIR for SrTiO3 thin film vibration touch panel applications

Hyun Jun Hwang; Soo Chul Lim; Kyung Chul Ok; Jin Seong Park; Hak Sung Kim

doi:10.1088/0957-4484/27/50/505209

Photonic sintering via flash white light combined with deep UV and NIR for SrTiO₃ thin film vibration touch panel applications

Hyun Jun Hwang, Soo Chul Lim, Kyung Chul Ok, Jin Seong Park, Hak Sung Kim

Department of Mechanical, Robotics and Energy Engineering

Hanyang University

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO₃ (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 °C-900 °C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.

Original language	English
Article number	505209
Journal	Nanotechnology
Volume	27
Issue number	50
DOIs	https://doi.org/10.1088/0957-4484/27/50/505209
State	Published - 18 Nov 2016

Keywords

deep ultraviolet
flash white light
near infrared
SrTiO
vibration touch panel

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10.1088/0957-4484/27/50/505209

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title = "Photonic sintering via flash white light combined with deep UV and NIR for SrTiO3 thin film vibration touch panel applications",

abstract = "An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO3 (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 °C-900 °C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.",

keywords = "deep ultraviolet, flash white light, near infrared, SrTiO, vibration touch panel",

author = "Hwang, {Hyun Jun} and Lim, {Soo Chul} and Ok, {Kyung Chul} and Park, {Jin Seong} and Kim, {Hak Sung}",

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AU - Hwang, Hyun Jun

AU - Lim, Soo Chul

AU - Ok, Kyung Chul

AU - Park, Jin Seong

AU - Kim, Hak Sung

PY - 2016/11/18

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N2 - An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO3 (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 °C-900 °C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.

AB - An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO3 (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 °C-900 °C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.

KW - deep ultraviolet

KW - flash white light

KW - near infrared

KW - SrTiO

KW - vibration touch panel

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Photonic sintering via flash white light combined with deep UV and NIR for SrTiO₃ thin film vibration touch panel applications

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Keywords

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