Preparation and characterization of TaAlOx high-κ dielectric for metal-insulator-metal capacitor applications
- M. K. Hota
- , C. Mahata
- , M. K. Bera
- , S. Mallik
- , C. K. Sarkar
- , S. Varma
- , C. K. Maiti
- Indian Institute of Technology Kharagpur
- Institute of Science Tokyo
- Jadavpur University
- Institute of Physics Bhubaneswar
Research output: Contribution to journal › Article › peer-review
12
Scopus
citations