Preparation and characterization of TaAlOx high-κ dielectric for metal-insulator-metal capacitor applications

  • M. K. Hota
  • , C. Mahata
  • , M. K. Bera
  • , S. Mallik
  • , C. K. Sarkar
  • , S. Varma
  • , C. K. Maiti

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Preparation and characterization of TaAlOx high-κ dielectric for metal-insulator-metal capacitor applications'. Together they form a unique fingerprint.
Sort by

Material Science