Abstract
In this study, thin YSZ film was prepared by electrostatic spray deposition. The morphology of thin film was strongly influenced by precursor solution and substrate temperature. Especially, dense YSZ film was obtained at the substrate temperature of 400°C. The YSZ film growth rate was 12 μm/h at the optimum, conditions. Product film was characterized by XRD, FE-SEM, and. EDX.
| Original language | English |
|---|---|
| Pages (from-to) | 117-121 |
| Number of pages | 5 |
| Journal | Applied Chemistry for Engineering |
| Volume | 19 |
| Issue number | 1 |
| State | Published - Feb 2008 |
Keywords
- Electrolyte
- Electrostatic spray deposition
- SOFC
- Thin film
- YSZ