Room temperature deposited oxygen-deficient CeO 2−x layer for multilevel resistive switching memory

Muhammad Ismail, Asma Ahmad, Khalid Mahmood, Tahira Akbar, Anwar Manzoor Rana, Jinju Lee, Sungjun Kim

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

Precise switchover of numerous resistance states is desirable to achieve repeatable multilevel data storage memory windows. However, this could be hindered by the inherent random nature of oxygen vacancy creation. In this study, oxygen-deficient CeO 2−x thin films were fabricated on indium tin oxide (ITO)-coated/glass substrates using radio-frequency magnetron sputtering at room temperature to obtain simple Ni/CeO 2−x /ITO/glass devices. Multilevel bipolar resistive switching characteristics were investigated by controlling the RESET voltage and current compliance. The device could be regarded as four-level switching memory, controlled by the RESET voltage. An increase in the RESET-stop voltage from −1.5 to −2.0 V increased the Schottky barrier height, leading to an improvement in the ON/OFF ratio. The multilevel resistive switching behavior could be attributed to the formation and partial rupture of conductive filaments owing to interfacial oxygen ion migration. This study shows the potentials of the Ni/CeO 2−x /ITO/glass devices for multilevel data storage resistive random-access memory applications.

Original languageEnglish
Pages (from-to)803-810
Number of pages8
JournalApplied Surface Science
Volume483
DOIs
StatePublished - 31 Jul 2019

Keywords

  • Multilevel resistive switching
  • Oxygen vacancy
  • Oxygen-deficient CeO film
  • Schottky emission

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