Abstract
Hydrogenation effects on Si- and Be-ion-implanted GaAs exposed to the hydrogen plasma were investigated. In the sample hydrogenated for 60 min at room temperature, electron mobilities were increased about 21% at 300 K and 1400 cm2/V s at 150 K, showing a little change of the activated Si donor profile. Also, by using deep-level transient spectroscopy and optical deep-level transient spectroscopy, it was observed that the electron and hole traps at Ec-0.62- and Ev+0.68-eV levels, which have been reported as defects due to the implanted damage, were efficiently decreased during the room-temperature hydrogenation. This effect persists during the anneal at 400°C during 5 min in an argon ambient.
Original language | English |
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Pages (from-to) | 1690-1692 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 71 |
Issue number | 4 |
DOIs | |
State | Published - 1992 |