@inproceedings{564b1fc2ba594af18b9b6e0af941f920,
title = "Spectroscopic detection of (i) intrinsic band edge defects, and (ii) transition metal (TM) and rare earth lanthanide (REL) atom occupied states in elemental and complex oxides: A novel pathway to (i) device reliability and (ii) increased functionality in ULSI CMOS",
abstract = "A novel application of synchrotron soft-X-ray spectroscopy is applied to (i) the detection of intrinsic bonding defects, and (ii) partially occupied TM and REL atom valence band edge dand d- and f-states. Spectroscopic identification and correlation with electrical performance is crucial for the identification and optimization of TM/REL elemental and complex oxides for advanced ULSI devices.",
author = "Gerald Lucovsky and Hyungtak Seo and Chung, \{Kwun Bum\} and Jinwu Kim",
year = "2009",
doi = "10.1109/ULIS.2009.4897547",
language = "English",
isbn = "9781424437054",
series = "Proceedings of the 10th International Conference on ULtimate Integration of Silicon, ULIS 2009",
pages = "95--98",
booktitle = "Proceedings of the 10th International Conference on ULtimate Integration of Silicon, ULIS 2009",
note = "10th International Conference on ULtimate Integration of Silicon, ULIS 2009 ; Conference date: 18-03-2009 Through 20-03-2009",
}