Studies on optical, chemical, and electrical properties of rapid SiO 2 atomic layer deposition using tris(tert-butoxy)silanol and trimethyl-aluminum
- Dongwon Choi
- , Boo Kyung Kim
- , Kwun Bum Chung
- , Jin Seong Park
- Dankook University
Research output: Contribution to journal › Article › peer-review
18
Scopus
citations