Studies on the pull-up RF MEMS switch for the lower actuation voltage and high speed using double electrode

Seong Dae Lee, Byoung Chol Jun, Tae Jong Baek, Soon Koo Kim, Sam Dong Kim, Jin Koo Rhee, Koji Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report a pull-up type RF MEMS switch using double electrode without elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.7 dB and an isolation of 50.7 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 80 ns, respectively.

Original languageEnglish
Title of host publicationAPMC 2005
Subtitle of host publicationAsia-Pacific Microwave Conference Proceedings 2005
DOIs
StatePublished - 2005
EventAPMC 2005: Asia-Pacific Microwave Conference 2005 - Suzhou, China
Duration: 4 Dec 20057 Dec 2005

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC
Volume1

Conference

ConferenceAPMC 2005: Asia-Pacific Microwave Conference 2005
Country/TerritoryChina
CitySuzhou
Period4/12/057/12/05

Fingerprint

Dive into the research topics of 'Studies on the pull-up RF MEMS switch for the lower actuation voltage and high speed using double electrode'. Together they form a unique fingerprint.

Cite this