Studies on the pull-up RF MEMS switch for the lower actuation voltage and high speed using double electrode

  • Seong Dae Lee
  • , Byoung Chol Jun
  • , Tae Jong Baek
  • , Soon Koo Kim
  • , Sam Dong Kim
  • , Jin Koo Rhee
  • , Koji Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report a pull-up type RF MEMS switch using double electrode without elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.7 dB and an isolation of 50.7 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 80 ns, respectively.

Original languageEnglish
Title of host publicationAPMC 2005
Subtitle of host publicationAsia-Pacific Microwave Conference Proceedings 2005
DOIs
StatePublished - 2005
EventAPMC 2005: Asia-Pacific Microwave Conference 2005 - Suzhou, China
Duration: 4 Dec 20057 Dec 2005

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC
Volume1

Conference

ConferenceAPMC 2005: Asia-Pacific Microwave Conference 2005
Country/TerritoryChina
CitySuzhou
Period4/12/057/12/05

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