@inproceedings{75dacdc04b6744349f61f33d0b408184,
title = "Sub-wavelength metal nanostructure fabrication by parallel dip-pen nanolithography",
abstract = "Metal nanostructures at sub-wavelength scale have been used as plasmonic diffraction gratings and negative index metamaterials and have attracted interests in materials engineering and optics research. E-beam lithography is commonly used to fabricate these metal nanostructures; however, e-beam lithography has limitation in scale-up of nanostructure fabrication and is expensive. In this study, a low cost and convenient scale-up fabrication method for metal nanostructures using Dip Pen Nanolithography{\textregistered} (DPN{\textregistered}) is demonstrated. DPN was used to deposit alkanethiol patterns, which were then used as etch resists for top-down nanofabrication processes to generate Au nano-features. As a proof of concept, arrays of three different designed double-ring Split-Ring Resonators (SRRs) were fabricated by DPN printing.",
keywords = "Alkanethiol, Dip-pen nanolithography, Metal nanostructure, Metamaterials",
author = "Jang, {Jae Won} and Nettikadan, {Saju R.}",
year = "2011",
language = "English",
isbn = "9781439871393",
series = "Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011",
pages = "92--95",
booktitle = "Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011",
note = "Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 ; Conference date: 13-06-2011 Through 16-06-2011",
}