Suppression of defect states in HfSiON gate dielectric films on n -type Ge(100) substrates

K. B. Chung, H. Seo, J. P. Long, G. Lucovsky

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Suppression of defect states in HfSiON gate dielectric films on n -type Ge(100) substrates'. Together they form a unique fingerprint.

Engineering

Material Science