Surface-Shielding Nanostructures Derived from Self-Assembled Block Copolymers Enable Reliable Plasma Doping for Few-Layer Transition Metal Dichalcogenides

Soonmin Yim, Dong Min Sim, Woon Ik Park, Min Jae Choi, Jaesuk Choi, Jaebeom Jeon, Kwang Ho Kim, Yeon Sik Jung

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

Precise modulation of electrical and optical properties of 2D transition metal dichalcogenides (TMDs) is required for their application to high-performance devices. Although conventional plasma-based doping methods have provided excellent controllability and reproducibility for bulk or relatively thick TMDs, the application of plasma doping for ultrathin few-layer TMDs has been hindered by serious degradation of their properties. Herein, a reliable and universal doping route is reported for few-layer TMDs by employing surface-shielding nanostructures during a plasma-doping process. It is shown that the surface-protection oxidized polydimethylsiloxane nanostructures obtained from the sub-20 nm self-assembly of Si-containing block copolymers can preserve the integrity of 2D TMDs and maintain high mobility while affording extensive control over the doping level. For example, the self-assembled nanostructures form periodically arranged plasma-blocking and plasma-accepting nanoscale regions for realizing modulated plasma doping on few-layer MoS2, controlling the n-doping level of few-layer MoS2 from 1.9 × 1011 cm−2 to 8.1 × 1011 cm−2 via the local generation of extra sulfur vacancies without compromising the carrier mobility.

Original languageEnglish
Pages (from-to)5631-5640
Number of pages10
JournalAdvanced Functional Materials
Volume26
Issue number31
DOIs
StatePublished - 16 Aug 2016

Keywords

  • block copolymer
  • molybdenum disulfide
  • plasma doping
  • self-assembly
  • transition metal dichalcogenide

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