Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current

Suspended few-layer graphene beam electro-mechanical switches (SGSs) with 0.15 m air-gap are fabricated and electrically characterized. The SGS shows an abrupt on/off current characteristics with minimal off current. In conjunction with the narrow air-gap, the outstanding mechanical properties of graphene enable the mechanical switch to operate at a very low pull-in voltage (V _PI) of 1.85 V, which is compatible with conventional complimentary metal-oxide-semiconductor (CMOS) circuit requirements. In addition, we show that the pull-in voltage exhibits an inverse dependence on the beam length.