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The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants

  • J. Park
  • , Tae Hoon Jung
  • , Jung Hoon Lee
  • , Hyun Suk Kim
  • , Jin Seong Park
  • Korea Advanced Institute of Science and Technology
  • Hanyang University

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

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