Toward self-ordered silica nanotubes by electrochemical anodization of Si(100)

Min Yang, Nabeen K. Shrestha, Patrik Schmuki

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

In the present work, we produce self-ordered silica nanostructures by anodization of p-type Si(100) wafers in dilute fluoride-containing organic electrolytes. The effects of water content, fluoride concentrations, and potential are investigated. In electrolytes containing sufficiently low water and fluoride concentrations, nanoporous and nanotubular structures can be formed. X-ray photoelectron spectroscopy and X-ray diffraction results confirm that the structures consist of SiO2. Under optimized conditions, self-ordered nanotubular silica structures can be formed with individual tube diameters of ∼30 nm.

Original languageEnglish
Pages (from-to)C25-C28
JournalElectrochemical and Solid-State Letters
Volume13
Issue number9
DOIs
StatePublished - 2010

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