Abstract
In the present work, we produce self-ordered silica nanostructures by anodization of p-type Si(100) wafers in dilute fluoride-containing organic electrolytes. The effects of water content, fluoride concentrations, and potential are investigated. In electrolytes containing sufficiently low water and fluoride concentrations, nanoporous and nanotubular structures can be formed. X-ray photoelectron spectroscopy and X-ray diffraction results confirm that the structures consist of SiO2. Under optimized conditions, self-ordered nanotubular silica structures can be formed with individual tube diameters of ∼30 nm.
Original language | English |
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Pages (from-to) | C25-C28 |
Journal | Electrochemical and Solid-State Letters |
Volume | 13 |
Issue number | 9 |
DOIs | |
State | Published - 2010 |