Abstract
We have observed unipolar-type resistance switching in an ultrathin niobium oxide film. An analysis of the temperature dependence of the resistance switching transport revealed that low-resistance state showed a type of electrical conduction typically observed in metals. The modification in chemical binding states of the film in different resistance states was studied using x-ray photoelectron spectroscopy. The analysis of XPS showed that metallic suboxides NbO (δ ≪ 2), decomposed from some of Nb2O 5 and NbO2 components of the film, were created after electroforming process, suggesting that the metallic suboxides are constituting elements of metallic channels in the low resistance state.
Original language | English |
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Article number | 054511 |
Journal | Journal of Applied Physics |
Volume | 109 |
Issue number | 5 |
DOIs | |
State | Published - 1 Mar 2011 |