TY - JOUR
T1 - UV-FEL photo-electron emission microscopy of the dynamics of nanostructures on silicon surfaces
AU - Yang, W. C.
AU - Ade, H.
AU - Nemanich, R. J.
N1 - Publisher Copyright:
© 2001 SPIE.
PY - 2001/6/29
Y1 - 2001/6/29
N2 - The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi2 islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.
AB - The combination of a wavelength tunable UV free electron laser and a high resolution photo-electron emission microscope offers unprecedented opportunities for in situ, real time imaging of the dynamics of processes on surfaces on a nanometer scale. This type of system is now in operation at the Duke University Free Electron Laser Laboratory. In this study we report real time observations of the dynamics of liquid Pt-Si islands on Si(100) surfaces. The dynamics of coalescence is observed. Moreover, a driving force for motion of the liquid micro-droplets is developed based on these observations. We also report studies of the dynamics of growth of nanometer scale TiSi2 islands on Si(111). Depending on the growth conditions, we observe ripening or coalescence processes where smaller islands evolve into larger islands. On the (111) surface a shape transition is observed in which the islands are initially circular and then develop into long wire shaped structures. The growth processes represent a competition between kinetic and energetic processes on the surfaces.
UR - http://www.scopus.com/inward/record.url?scp=84861437832&partnerID=8YFLogxK
U2 - 10.1117/12.432507
DO - 10.1117/12.432507
M3 - Conference article
AN - SCOPUS:84861437832
SN - 0277-786X
VL - 4274
SP - 168
EP - 176
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Laser Applications in Microelectronic and Optoelectronic Manufacturing VI 2001
Y2 - 20 January 2001 through 26 January 2001
ER -