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Wafer-scale production of uniform InAsyP1-ynanowire array on silicon for heterogeneous integration

  • Jae Cheol Shin
  • , Ari Lee
  • , Parsian Katal Mohseni
  • , Do Yang Kim
  • , Lan Yu
  • , Jae Hun Kim
  • , Hyo Jin Kim
  • , Won Jun Choi
  • , Daniel Wasserman
  • , Kyoung Jin Choi
  • , Xiuling Li
  • Korea Photonics Technology Institute
  • University of Illinois at Urbana-Champaign
  • Korea Institute of Science and Technology
  • Ulsan National Institute of Science and Technology

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

One-dimensional crystal growth allows the epitaxial integration of compound semiconductors on silicon (Si), as the large lattice-mismatch strain arising from heterointerfaces can be laterally relieved. Here, we report the direct heteroepitaxial growth of a mixed anion ternary InAsyP1-y nanowire array across an entire 2 in. Si wafer with unprecedented spatial, structural, and special uniformity across the entire 2 in. wafer and dramatic improvements in aspect ratio (>100) and area density (>5 × 10 8/cm2). Heterojunction solar cells consisting of n-type InAsyP1-y (y = 0.75) and p-type Si achieve a conversion efficiency of 3.6% under air mass 1.5 illumination. This work demonstrates the potential for large-scale production of these nanowires for heterogeneous integration of optoelectronic devices.

Original languageEnglish
Pages (from-to)5463-5471
Number of pages9
JournalACS Nano
Volume7
Issue number6
DOIs
StatePublished - 25 Jun 2013

Keywords

  • III-V semiconductor
  • InAsP
  • MOCVD
  • heterojunction
  • nanowire

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